Entegris
Model: Wafergard® II F Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.
●PTFE membranes provide high-efficiency filtration
●Low pressure-drop reduces the risk of condensation in lower vapor pressure gases
●Excellent compatibility with all classes of semiconductor process gases
●For use with inert and reactive gases, including ozone
●PTFE membranes provide high-efficiency filtration
●Low pressure-drop reduces the risk of condensation in lower vapor pressure gases
●Excellent compatibility with all classes of semiconductor process gases
●For use with inert and reactive gases, including ozone
