Entegris
Model: Wafergard® II F-1500 In-line Gas Filters
Delivering superior particulate filtration for ultrapure gas systems while providing excellent compatibility with all classes of semiconductor process gases.
●PTFE membranes provide high efficiency filtration
●Low pressure drop reduces the risk of condensation in low vapor pressure gases
●Excellent compatibility with all classes of semiconductor process gases
●Cleanroom packaged by vacuum bagging and double bagging provides superior out-of-box cleanliness
●PTFE membranes provide high efficiency filtration
●Low pressure drop reduces the risk of condensation in low vapor pressure gases
●Excellent compatibility with all classes of semiconductor process gases
●Cleanroom packaged by vacuum bagging and double bagging provides superior out-of-box cleanliness
