Entegris
Model: Wafergard® MAX HT In-line Gas Filters
Superior particulate filtration for high-temperature, ultrapure gas applications.
●Designed for high-temperature TEOS and high-k applications up to 200°C (392°F)
●Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters
●The compact size fits many existing delivery systems and provides design flexibility and versatility
●Special baking enables rapid gas delivery startup
●Low differential pressure provides stable and improved material delivery
●Designed for high-temperature TEOS and high-k applications up to 200°C (392°F)
●Overall design (148 mm [5.82"]) is a drop-in replacement for similar filters
●The compact size fits many existing delivery systems and provides design flexibility and versatility
●Special baking enables rapid gas delivery startup
●Low differential pressure provides stable and improved material delivery
