Entegris
Model: GateKeeper® HGU Heated Getter Gas Purifiers
These PS2, PS3, PS4 heated getter gas purifiers utilizes the only purifier technology capable of removing all hydrocarbons and nitrogen from process gases.
●Point-of-use (POU) gas purification ensures consistent and repeatable process performance, isolates critical process areas from house gas distribution systems, and protects against gas purity upsets and cross contamination
●Provides the most complete removal of impurities for rare gases, nitrogen (N2), and hydrogen (H2), with high reliability, low cost, and high performance
●The heated getter material forms irreversible chemical bonds with any oxide, carbide, and nitride impurities
●Optimized design provides sub-ppb performance, which is better than gas from cylinder or liquid sources, in small footprints with flow rates up to 150 slpm (9 Nm3/hr)
●Point-of-use (POU) gas purification ensures consistent and repeatable process performance, isolates critical process areas from house gas distribution systems, and protects against gas purity upsets and cross contamination
●Provides the most complete removal of impurities for rare gases, nitrogen (N2), and hydrogen (H2), with high reliability, low cost, and high performance
●The heated getter material forms irreversible chemical bonds with any oxide, carbide, and nitride impurities
●Optimized design provides sub-ppb performance, which is better than gas from cylinder or liquid sources, in small footprints with flow rates up to 150 slpm (9 Nm3/hr)
