Entegris
Model: GateKeeper® GPU Gas Purifiers
GateKeeper® GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity.
●Purity to ppt levels
●Wide range of gas compatibility, including corrosive gases such as Cl2, HBr, HCl, CF4, SO2, SF6
●Low pressure drop across the purifier
●CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
●Regenerable – eliminates disposal issues and costs
●Purity to ppt levels
●Wide range of gas compatibility, including corrosive gases such as Cl2, HBr, HCl, CF4, SO2, SF6
●Low pressure drop across the purifier
●CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
●Regenerable – eliminates disposal issues and costs
